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Image Reversal - New Process Option Available at Ångström MSL

Last Updated Sep 2012
By: Stefan Nygren

A new tool, for conventional vapour priming and image reversal, was recently installed at MSL. Image reversal is a process where exposed areas of positive resist remain after processing (thus behaving like a negative resist). This offers several advantages, such as:

  • Better resolution compared to negative resist.
  • Negative sidewall profile suitable for liftoff processing.
  • Possibility to control sidewall profile with exposure dose.
  • Possibility to get positive or negative images with the same mask independent of polarity.