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Marcus Rommel

 

     Marcus Rommel

Researcher with responsibility in electron-beam and laser writer lithography.

Tel: +46 31 772 21 17

Mobile: +46 70-873 11 58

List of tools where Marcus Rommel is tool responsible

 

 NameTypeTool Id
DetailsDry etch ICP - Oxford Plasmalab 100 - Two chambersRIE etch404
DetailsSEM - Zeiss Supra 60 VP - EDXSEM116
DetailsSoftware - GenISys BEAMER 1410
DetailsSoftware - GenISys LAB 1411
DetailsEvaporator - Lesker Nano Cr 455
DetailsDry etch ICP - Oxford PlasmaPro 100 405
DetailsEBL - Raith EBPG 5200 215
DetailsSEM - Zeiss Supra 55 - EDX 115