Researchers from universities and research institutes across Europe recently gathered at Chalmers University of Technology for a two-day hands-on MEMS training course as part of the INFRACHIP Research Accelerator Programme.
Hosted in Chalmers cleanroom, the participants followed the complete fabrication flow of an acoustic MEMS device, gaining practical experience in wafer cleaning, photolithography, laser writing, metal deposition, lift-off, dicing, and electrical characterisation using a Vector Network Analyser (VNA). The programme combined cleanroom work with lectures and device testing, providing a comprehensive introduction to MEMS fabrication and characterisation.
The training was delivered with contributions from experts at Chalmers, Myfab, GOMOD AB and Onsala Space Observatory. Participants represented Izmir Institute of Technology, Loughborough University, INESC TEC, Kaunas University of Technology, and Tyndall National Institute.
The activity was organised within the EU-funded INFRACHIP project, which supports researcher training and access to advanced semiconductor and microfabrication infrastructures across Europe.
